ALD20 - performance for semiconductor applications
The maximum temperature rating of the body and actuatoris extended from 200 °C (392 °F) to 250 °C (482 °F). The temperature rating covers both continuous process operation and ambient temperature limits e.g. ALD furnace or reactor chamber conditions.
The changes do not affect the shape, material or compatibility of the product and no changes have been made to the assembly process. Product performance has been verified by comprehensive and thorough testing at elevated temperatures.
The product description has been updated to reflect the change and you can read more about the product in the attached catalogue: Ultrahigh-Purity Valves for Atomic Layer Processing, ALD, Diaphragm and Bellows Valves (MS-02-301;rev_S;en-US;Catalogue)
For more information, please contact our sales team:
info@swagelok.fi
+358 9 777 1110